Formation of Patterned Microstructures of Conducting Polymers by Soft Lithography, and Applications in Microelectronic Device Fabrication

Micromolding in capillaries (MIMIC)has been used to form patterned relief structures with lateral dimensions as small as ∼350 nm. The microstructure in the figure consists of polyaniline (on an insulating Si/SiO2 base) that has been converted into the emeraldine salt to yield a conductive microstructure that could subsequently be used as a patterned electrode in fabricating all-plastic field effect transistors.