Fatigue of Small-Volume Structures: Micromachined Silicon Films

Silicon-based microelectromechanical systems (MEMS) have been a prominent material platform since micromachining technologies were adapted from the microelectronics industry. Fatigue-induced drift and other degradation of MEMS are critical considerations for a wide range of circuit, sensor, and display technologies. The first objective of this chapter is to provide a review of what is currently known about the fracture and high cycle fatigue behavior of silicon structural films. The second objective is to review the fracture mechanics-based design methodologies that ensure reliable MEMS in safety-critical applications.