Fabrication of Silicon-on-Insulator Substrates Using Plasma Technologies

Paul Kim Ho Chu

doi:10.1109/edssc.2007.4450058

Abstract

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This invited paper reviews the work done in our laboratory on the fabrication of silicon-on-insulator (SOI) materials using plasma hydrogenation and the synthesis of novel silicon-on-diamond and silicon-on-dual-insulator SOI structures with better thermal properties.

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