Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors

Submicrometer patterns of glasses on a substrate have been created using a type of soft lithography. The method, which is complementary to photolithography and rapid ion etching, is described and examples of applications are given. The Figure shows a scanning electron micrograph of a membrane of titanosilicate glass after an aqueous suspension of 2 μm beads had passed through it.