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Effects of pulsing frequencies on macro-particle contamination during pulsed vacuum arc deposition — Hua Dai (2006) | RDL Network
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Effects of pulsing frequencies on macro-particle contamination during pulsed vacuum arc deposition
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Paul Kim Ho Chu
Effects of pulsing frequencies on macro-particle contamination during pulsed vacuum arc deposition
Article
2006
en
Authors
+2 more
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Hua Dai
LL
Liuhe Li
YH
Yawei Hu
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