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Effects of plasma hydrogenation on low temperature growth of nanocrystalline cubic SiC thin films — Min Wang (2006) | RDL Network
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Effects of plasma hydrogenation on low temperature growth of nanocrystalline cubic SiC thin films
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Paul Kim Ho Chu
Effects of plasma hydrogenation on low temperature growth of nanocrystalline cubic SiC thin films
Article
2006
en
Authors
+2 more
MW
Min Wang
AH
Anping Huang
Paul Kim Ho Chu
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