Abstract The effects of flow rate on the plasma polymerization of ethylene in an rf discharge were investigated using both a tubular and a bell-jar-type of reactor. Both reactors contained parallel plate internal electrodes. Experiments with the tubular reactor showed that both the total thickness of the deposit and its distribution in the axial direction were strong functions of the flow rate. At low flow rates the polymer thickness decreased in the flow direction, while at high flow rates the polymer thickness increased. Each of these observations is explained by a simple model of plasma polymerization. Using the bell-jar reactor, different monomer flow distribution configurations were tested to determine their effect on the distribution of polymer thickness. It was found that distribution or diffusion of the monomer inflow provided a more uniform film.
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