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Effects of ion flux density and energy on the composition of TiNx thin films prepared by magnetron sputtering with an anode layer ion source — Abdul Mateen Qasim (2018) | RDL Network
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Effects of ion flux density and energy on the composition of TiNx thin films prepared by magnetron sputtering with an anode layer ion source
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Paul Kim Ho Chu
Effects of ion flux density and energy on the composition of TiNx thin films prepared by magnetron sputtering with an anode layer ion source
Article
2018
en
Authors
+5 more
AQ
Abdul Mateen Qasim
AF
Ali Farhat
HW
Hao Wu
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