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Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation — Banani Sen (2008) | RDL Network
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Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation
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Paul Kim Ho Chu
Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation
Article
2008
en
Authors
+3 more
BS
Banani Sen
BY
B. L. Yang
HW
Hei Wong
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