Effect of plasma CVD operating temperature on nanomechanical properties of TiC nanostructured coating investigated by atomic force microscopy

Ali Shanaghi; A. Sabour Rouhaghdam; Shahrokh Ahangarani; Paul Kim Ho Chu

doi:10.1016/j.materresbull.2012.06.003

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Effect of plasma CVD operating temperature on nanomechanical properties of TiC nanostructured coating investigated by atomic force microscopy

Article 2012 en

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