Effect of boron incorporation on the lattice parameter and texture of diamond films deposited by chemical vapour deposition on silicon

Daniel Chateigner; Fabrice Brunet; A. Deneuville; P. Germi; M. Pernet; E. Gheeraert; P. Gonon

doi:10.1016/0022-0248(94)00668-7

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Effect of boron incorporation on the lattice parameter and texture of diamond films deposited by chemical vapour deposition on silicon

Article 1995 en

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