Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry — Alexis Franquet (2001) | RDL Network
Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry
Thin Solid Films 384(1): 37-45
Article 2001 English
Authors
AF
Alexis Franquet
JL
J. De Laet
TS
T. Schram
Abstract
1 min read
The thickness of thin films of non-functional silane bis-1,2-(triethoxysilyl)ethane (H5C2O)3Si-CH2CH2-Si(OC2H5)3 (BTSE) deposited on aluminium surfaces is investigated using spectroscopic ellipsometry (250–1700 nm). The data processing of the ellipsometry spectra is carried out by means of simulation and regression techniques. New advances in data processing, e.g. multiple sample analysis and determination of thickness non-uniformity, are applied to characterise these thin polymer films realistically. The influence of the concentration of the BTSE solution and the curing of the film is investigated. Optical thickness estimates are corroborated by independent auger electron spectroscopy and transmission electron microscopy analysis.
Fabiola Brusciotti, Abdelkrim Batan, Iris De Graeve, Mireille Wenkin, M. Biessemans, R. Willem, François Reniers, J. J. Pireaux, M. Piens, J. Vereecken, Herman Terryn
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