A traveling wave ultrasonic motor (TWUM) with a spherical rotor was designed and fabricated for a haptic interface. The mechanical characteristics testbed was set up to test the performance of the motor under the modulation of frequency and phase difference, as well as for conducting haptic interaction, and the phase difference modulation based on certain frequency was adopted as the driving mode for the proposed motor. Due to the complexity and uncertainty of the contact mechanics of the stator and rotor, the direct torque control effect of the TWUM is not ideal for the force feedback. In this paper, the impedance control method was adopted to realize the force interaction based on positional proportional–integral–derivative (PID) control. The virtual linear spring and virtual wall experiments are conducted to verify the effect of the proposed method. Results show that the position-based impedance control method has a better effect than direct torque control for the haptic interaction based on an ultrasonic motor (USM).
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