Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure

Yang Mu; Xiaoman Zhang; John W. Hutchinson; W. J. Meng

doi:10.1557/mrc.2016.20

Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure

MRS Communications 6(3): 289-294

Article 2016 English

Abstract

1 min read

Axial compression was conducted on micro-pillars, in which polycrystalline Cu thin films were sandwiched between CrN and Si. Plastic flow of Cu was achieve

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Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure

Abstract

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