Comparative study of TiAlN coatings deposited by different high-ionization physical vapor deposition techniques

Liangliang Liu; Wei Tang; Lin Zhou; Zhongcan Wu; Zhongcan Wu; Qingdong Ruan; Xiaoyuan Li; Abdul Mateen Qasim; Suihan Cui; Tijun Li; Ricky K.Y. Fu; Xiubo Tian; Paul Kim Ho Chu

doi:10.1016/j.ceramint.2020.01.092

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Comparative study of TiAlN coatings deposited by different high-ionization physical vapor deposition techniques

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