Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition

Ming Xu; Xun Cai; Jun Zhao; Qiulong Chen; Paul Kim Ho Chu

doi:10.1016/j.tsf.2007.05.052

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Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition — Ming Xu (2007) | RDL Network

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Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition

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Paul Kim Ho Chu

Comparative studies on influence of acetylene to argon flow rate ratios on nano-scratch behavior of a-C:H films produced on steel substrates by plasma immersion ion implantation and deposition

Article 2007 en

Authors

MX
Ming Xu
XC
Xun Cai
JZ
Jun Zhao

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Publication Info

DOI: 10.1016/j.tsf.2007.05.052
Year: 2007
Published: —
Language: en

Article Details

Volume: 516
Issue: 2-4
Link Of The Paper: https://doi.org/10.1016/j.tsf.2007.05.052

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June 19, 2026