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Characteristics of interface between Ta2O5 thin film and Si (100) substrate — Anping Huang (2005) | RDL Network
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Characteristics of interface between Ta2O5 thin film and Si (100) substrate
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Paul Kim Ho Chu
Characteristics of interface between Ta2O5 thin film and Si (100) substrate
Article
2005
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Authors
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Anping Huang
Paul Kim Ho Chu
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