Bulk Acoustic Resonator Based on Piezoelectric ZnO Belts

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt−Leedom−Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.