A Triboelectric Nanogenerator as a Self‐Powered Sensor for a Soft–Rigid Hybrid Actuator

Abstract Triboelectric nanogenerators are a promising technology for use in self‐powered sensors, which take advantage of multiple choices of materials and high response to low‐frequency triggering. Here, a conductive sponge/porous silicone‐based triboelectric nanogenerator (SS‐TENG) is demonstrated as a tactile sensor for a hybrid actuator. To fabricate the SS‐TENGs, liquid silicone and ethanol are mixed well and then infiltrated inside a conductive sponge. When heated, the ethanol evaporates from the silicone, leaving plenty of empty pores. Every pore supplies the contact and separation space for the conductive sponge and silicone to form a micro TENG, and the whole bulk makes up the SS‐TENG. When deformed, the SS‐TENG outputs electric signals. The open‐circuit voltage linearly increases from 3.9 to 17 V as the force increases from 2.9 to 9.9 N. In addition, when touched, the electric signals generated by SS‐TENGs can differentiate the corresponding objects. Finally, the SS‐TENGs are integrated with a soft–rigid hybrid actuator to form a bionic skeleton–muscle–skin hybrid gripper. The gripper can catch different objects and feedback electric signals, which show great potential for use in bionic robots.