A Simple growth model of ternary BCN compound is proposed in this paper.It was shown that surface coverage of radicals and growth rate of the compounds,incorporation rate and bulk concentration of element N are determined mainly by the ratio of N flux to the total flux of elements B and C,and a maximum growth rate is expected.For a fixed ratio of N flux to the total flux of elements B and C,the flux ratio of element B to C has little influence on the total growth rate,but it determines deposition rate and bulk concentration of elements B and C.
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