A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

Paul Kim Ho Chu; Kwok D.T.K.; Z.M. Zeng

A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes — Paul Kim Ho Chu (2000) | RDL Network

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A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

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Paul Kim Ho Chu

A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

Article 2000 en

Authors

Paul Kim Ho Chu
KD
Kwok D.T.K.
ZZ
Z.M. Zeng

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Publication Info

Year: 2000
Published: —
Language: en

Article Details

Issue: 2000
Link Of The Paper: https://briefs.techconnect.org/wp-content/volumes/MSM2000/pdf/T52.03.pdf

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Created:June 19, 2026

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