A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO>inf<2>/inf<Islands inside Insulated Alumina Nanochannels on Silicon Substrate

A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.