Plasma immersion ion implantation (PIII) has recently been shown to be a viable method to fabricate silicon-on-insulator (SOI) materials using either the SPIMOX (separation by plasma implantation of oxygen) or the ion cut/wafer bonding method. We have recently modified and characterized a new generation plasma immersion ion implanter for SOI fabrication, and this paper will discuss some of the instrumental and processing issues, including the plasma source, mean free path consideration, and dc sheath characteristics.
Summary form only given. The high voltage and electromagnetic field environment poses a big challenge to a control system for plasma immersion ion implantation (PIII). The automation process must be immune to electric field interference produced by the high voltage pulse power supply, radio frequency plasma generator, MEVVA plasma sources, and so on. We have recently designed and installed a distributed control system, PIIIDCS, for Pill facility. Programmable logic controllers (PLC) are used as the field control stations because of their good anti-interference ability and good real time response. A DH-485 network is used as the communication link between the field controllers and the management station in order to improve the robustness and reliability of the system. The newly developed interface is designed to work in a graphic mode in Microsoft Windows 95. Test runs have shown that the system is reliable, flexible, and easy to operate. The development of this novel control system will expedite the development of commercial PIII instrumentation.
Read moreSurface-enhanced Raman scattering (SERS) is recognized as one of the most sensitive spectroscopic tools offering highly sensitive chemical and biological detection. The fact that particle plasmon allows direct coupling of light to resonant electron plasmon oscillation has spurred tremendous efforts in the design and fabrication of highly SERS-active substrates in nanostructured films and metallic nanoparticles. Theoretical studies have shown that symmetry breaking allows for more complex plasmon propagation, potentially leading to more intense electromagnetic field generation along the structure and in gaps formed between these materials. Anisotropic metallic nanostructures have all of the characteristics that make them excellent candidates as SERS substrates. Thus, SERS is expected from anisotropic materials. This review focuses on the progress and advances in the design and fabrication of anisotropic nanostructures for SERS, with an emphasis on future challenges.
Read moreAligned CdS nanowire arrays have been fabricated directly on a Cd foil via a simple solvothermal method. The metal Cd foil serves as both the Cd source and substrate during fabrication of the aligned CdS nanowire arrays. The morphology, structure, and composition of the samples are characterized by x-ray diffraction, field-emission scanning electron microscopy, transmission electron microscopy, energy-dispersive x-ray spectroscopy, and selected-area electron diffraction, and the results reveal the formation of aligned single-crystalline CdS nanowires with uniform diameters of 20–40 nm. The photoluminescence and Raman spectra disclose the optical properties of the products and the possible growth mechanism is suggested. The electron field emission properties are also investigated and analyzed. The screening effect is observed to play a vital role in the electron field emission properties due to the coalescent ends of the nanowires. The simple synthesis methodology in conjunction with the good field emission and optical properties makes the materials both scientifically and technologically interesting.
Read moreTi/TiB 2 nanomultilayer thin films with different bilayer thicknesses λ were deposited onto unheated Si(100) wafers (for mechanical analyses) and AISI M42 tool steels (for tribological measurements) by unbalanced dc magnetron sputtering. The effects of different λ values on mechanical and tribological properties were investigated. These films were characterised and analysed in terms of their hardness by microindentation measurements, their surface root mean square roughness by AFM, their stress by an optical interference method, and their friction and wear behaviors by Rockwell-C testing, nano-/micro-scratch testing, dynamic impact testing and pin on disc tribometer. It was found that the mechanical and tribological properties of multilayer films (typically 1˙58±0˙10 µm in thickness) were closely related to λ (varied from 1˙1 to 9˙8 nm). For the best multilayer film with λ51˙9 nm, a maximum hardness of ∼32˙5 GPa was achieved and the best cohesive and adhesive strength was evidenced in terms of critical load values of L C1 (∼26 N) and L C2 (∼62 N). Moreover, by dynamic impact testing this multilayer film could endure impact cycles up to 4 × 10 5 without adhesive failure. However, when the λ was further decreased to 1˙1 nm, the hardness, cohesive and adhesive strength were decreased due to a high level of intermixing and lack of a layered structure. It was also found that the nanoscratch test under single pass and constant load conditions showed that the frictional coefficients decreased with λ and increased with normal load due to the ploughing effect. The enhanced hardness in the multilayer films with small λ values improved the wear resistance and lowered the frictional coefficients. These adhesive properties and wear performance are also discussed on the basis of mechanical properties and wear mechanisms.
Read moreElectrostatic drift waves (EDWs) in nonuniform quantum magnetized plasmas are described by the quantum hydrodynamic model. Electrons are viewed as a low-temperature Fermi gas. Analytical expression of the dispersion relationship of the quantum EDW is presented. Quantum effects are shown to affect the dispersion of the EDW significantly. The effects on the dispersion relation due to the magnetic field and spatial inhomogeneity give rise to results similar to the classical case. Our results should be relevant to dense astrophysical objects, e.g., neutron stars, magnet-stars, and white dwarfs.
Read moreChinese Clinical Trial Registry ChiCTR-OCH-13003729 . Registered 22 October 2013.
Read moreThe temperature-dependent optical properties of ZnO nanosheets and nanowires fabricated on conductive brass substrates with different surface-to-volume ratios and morphologies are investigated. The near band edge and deep-level emission mechanisms are studied. The blueshifted donor bound exciton D 0X peak and enhanced deep-level emission in the low-temperature photoluminescence spectrum of the nanosheets are due to the large surface-to-volume ratios. Although D 0X is the dominant emission from both the nanowires and nanosheets at low temperature, the room-temperature spectra are dominated by D 0X (nanowires) and first order longitudinal optical phonon replica of free exciton (nanosheets). The decay in the D 0X peak intensity stems from the thermal dissociation of D 0X to free exciton.
Read moreDiamondlike carbon (DLC) films are deposited on AISI 304 stainless-steel substrates using hollow-cathode chemical vapor deposition. The effects of the substrate bias on the structural and mechanical properties of the films are studied. X-ray photoelectron spectroscopy reveals the existence of CC (sp2) and C–C (sp3) functional groups in the films, and Raman spectra show that the ratio of the G (graphite) peak to the D (disorder) peak depends on the sample bias. The DLC film deposited at −50V bias has the highest sp3 content, and this is consistent with the G-band position and D-band full width at half maximum as a result of substrate biasing. The sample bias also has a critical influence on the thickness and hardness of the deposited films. The largest thickness (1700nm) and highest hardness (HV1099) are achieved at a bias voltage of −50V. All the films show low friction coefficients, and the sample treated at −200V gives rise to the lowest friction coefficient.
Read moreThe magnetorotational instability (MRI) is investigated using a two-fluid model. Electrons and singly charged ions are supposed to have the same angular velocity to eliminate the equilibrium current. The linear dispersion relation governing local MRI is derived. The instability criteria in the non-magnetized and weakly magnetized cases differ remarkably from those predicted by the one-fluid model. Based on the general magnetized case, we present the critical conditions for the occurrence of instability. Gyroeffects significantly alter the instability criterion and introduce four unstable regions, one of which is reduced to the magnetohydrodynamic result when the angular frequency is much less than the ion gyrofrequency. When the angular frequency is much less than the electron gyrofrequency, the ion gyroeffect contributes to the instability criterion and induces the Hall term.
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